XY-axis positioning is made of aluminum alloy.
The stage size is 100 x 100 mm.
The Range of Travel is 40 mm.
The Load Capacity is 21 kg.
The resolution is 0.5 microns / 0.25 microns with 10 / 20 micro-steps per step motor driver.
The typical repeatability accuracy is ± 1 microns.
The typical positioning accuracy is 15 microns.
The maximum speed is 10 mm / sec.