X-axis positioning is made of stainless steel without cover.
The stage size is 50 x 50 mm.
The Range of Travel is 150 mm.
The Load Capacity is 10 kg.
resolution is 1 microns / 0.5 microns with 10 / 20
micro-steps per step motor driver.
The typical repeatability accuracy is ± 1 microns.
The typical positioning accuracy is 20 microns.
The maximum speed is 40 mm / sec.