XY-axis positioning is made of stainless steel.
The stage size is 80 x 80 mm.
The Range of Travel is 30 mm.
The Load Capacity is 6 kg.
resolution is 0.5 microns / 0.25 microns with 10 / 20 micro-steps
per step motor driver.
The typical repeatability accuracy is ± 2 microns.
The typical positioning accuracy is 25 microns.
The maximum speed is 10 mm / sec.