This motorized
X-axis positioning is made of stainless steel without cover.
The stage size is 80x80 mm.
The Range of Travel is 100 mm.
The Load Capacity is 16 kg.
The resolution is 0.5 microns / 0.25 microns with 10 / 20 micro-steps per step motor driver.
The typical repeatability accuracy is ±
1 micron.
The typical positioning accuracy is 15 microns.
The maximum speed is 20 mm / sec.
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