This XYZ three-axis positioning is made of aluminum alloy.
The stage size is 80X80 mm.
The Range of Travel is 30 mm.
capacity is 9 kgf.
is 0.2 Ám / 0.1 Ám with 10 / 20 micro-step per step
The typical repeatability accuracy is ±0.5 µm.
The typical positioning accuracy is 5 µm.
The maximum speed is 10 mm / sec.